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Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge

Plasma polymerized a-C:H thin films have been deposited on Si (100) and aluminum coated glass substrates by a dielectric barrier discharge (DBD) operated at medium pressure using C(2)H(m)/Ar (m = 2, 4, 6) gas mixtures. The deposited films were characterized by Fourier transform infrared reflection a...

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Detalles Bibliográficos
Autores principales:	Chandrashekaraiah, Thejaswini Halethimmanahally, Bogdanowicz, Robert, Rühl, Eckart, Danilov, Vladimir, Meichsner, Jürgen, Thierbach, Steffen, Hippler, Rainer
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5456880/ https://www.ncbi.nlm.nih.gov/pubmed/28773715 http://dx.doi.org/10.3390/ma9070594

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