X-ray topography of subsurface crystal layers

New capabilities of the Berg–Barrett topographic method are demonstrated using a skew-asymmetric X-ray diffraction scheme for investigating structural changes near the surface of semiconductor materials. Specifying the X-ray extinction depth, the details of defects and strains are revealed with high...

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Detalles Bibliográficos
Autores principales: Swiatek, Zbigniew, Fodchuk, Igor, Zaplitnyy, Ruslan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2017
Materias:
Research Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458592/
https://www.ncbi.nlm.nih.gov/pubmed/28656038
http://dx.doi.org/10.1107/S1600576717007208
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author Swiatek, Zbigniew
Fodchuk, Igor
Zaplitnyy, Ruslan
author_facet Swiatek, Zbigniew
Fodchuk, Igor
Zaplitnyy, Ruslan
author_sort Swiatek, Zbigniew
collection PubMed
description New capabilities of the Berg–Barrett topographic method are demonstrated using a skew-asymmetric X-ray diffraction scheme for investigating structural changes near the surface of semiconductor materials. Specifying the X-ray extinction depth, the details of defects and strains are revealed with high resolution. Consequently, analysis of structural distortion of layers near the surface after various types of surface processing becomes more complete.
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spelling pubmed-54585922017-06-27 X-ray topography of subsurface crystal layers Swiatek, Zbigniew Fodchuk, Igor Zaplitnyy, Ruslan J Appl Crystallogr Research Papers New capabilities of the Berg–Barrett topographic method are demonstrated using a skew-asymmetric X-ray diffraction scheme for investigating structural changes near the surface of semiconductor materials. Specifying the X-ray extinction depth, the details of defects and strains are revealed with high resolution. Consequently, analysis of structural distortion of layers near the surface after various types of surface processing becomes more complete. International Union of Crystallography 2017-05-30 /pmc/articles/PMC5458592/ /pubmed/28656038 http://dx.doi.org/10.1107/S1600576717007208 Text en © Zbigniew Swiatek et al. 2017 http://creativecommons.org/licenses/by/2.0/uk/ This is an open-access article distributed under the terms of the Creative Commons Attribution (CC-BY) Licence, which permits unrestricted use, distribution, and reproduction in any medium, provided the original authors and source are cited.http://creativecommons.org/licenses/by/2.0/uk/
spellingShingle Research Papers
Swiatek, Zbigniew
Fodchuk, Igor
Zaplitnyy, Ruslan
X-ray topography of subsurface crystal layers
title X-ray topography of subsurface crystal layers
title_full X-ray topography of subsurface crystal layers
title_fullStr X-ray topography of subsurface crystal layers
title_full_unstemmed X-ray topography of subsurface crystal layers
title_short X-ray topography of subsurface crystal layers
title_sort x-ray topography of subsurface crystal layers
topic Research Papers
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458592/
https://www.ncbi.nlm.nih.gov/pubmed/28656038
http://dx.doi.org/10.1107/S1600576717007208
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AT zaplitnyyruslan xraytopographyofsubsurfacecrystallayers

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