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X-ray topography of subsurface crystal layers
New capabilities of the Berg–Barrett topographic method are demonstrated using a skew-asymmetric X-ray diffraction scheme for investigating structural changes near the surface of semiconductor materials. Specifying the X-ray extinction depth, the details of defects and strains are revealed with high...
Autores principales: | Swiatek, Zbigniew, Fodchuk, Igor, Zaplitnyy, Ruslan |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
International Union of Crystallography
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458592/ https://www.ncbi.nlm.nih.gov/pubmed/28656038 http://dx.doi.org/10.1107/S1600576717007208 |
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