Cargando…
Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum
Substrate materials that are high-temperature stable are essential for sensor devices which are applied at high temperatures. Although langasite is suggested as such a material, severe O and Ga diffusion into an O-affine deposited film was observed during annealing at high temperatures under vacuum...
Autores principales: | , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2015
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458837/ https://www.ncbi.nlm.nih.gov/pubmed/28793752 http://dx.doi.org/10.3390/ma8125497 |
_version_ | 1783241833742073856 |
---|---|
author | Seifert, Marietta Rane, Gayatri K Kirbus, Benjamin Menzel, Siegfried B Gemming, Thomas |
author_facet | Seifert, Marietta Rane, Gayatri K Kirbus, Benjamin Menzel, Siegfried B Gemming, Thomas |
author_sort | Seifert, Marietta |
collection | PubMed |
description | Substrate materials that are high-temperature stable are essential for sensor devices which are applied at high temperatures. Although langasite is suggested as such a material, severe O and Ga diffusion into an O-affine deposited film was observed during annealing at high temperatures under vacuum conditions, leading to a damage of the metallization as well as a change of the properties of the substrate and finally to a failure of the device. Therefore, annealing of bare LGS (La [Formula: see text] Ga [Formula: see text] SiO [Formula: see text]) substrates at 800 [Formula: see text] C under high vacuum conditions is performed to analyze whether this pretreatment improves the suitability and stability of this material for high temperature applications in vacuum. To reveal the influence of the pretreatment on the subsequently deposited metallization, RuAl thin films are used as they are known to oxidize on LGS at high temperatures. A local study of the pretreated and metallized substrates using transmission electron microscopy reveals strong modification of the substrate surface. Micro cracks are visible. The composition of the substrate is strongly altered at those regions. Severe challenges for the application of LGS substrates under high-temperature vacuum conditions arise from these substrate damages, revealing that the pretreatment does not improve the applicability. |
format | Online Article Text |
id | pubmed-5458837 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2015 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-54588372017-07-28 Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum Seifert, Marietta Rane, Gayatri K Kirbus, Benjamin Menzel, Siegfried B Gemming, Thomas Materials (Basel) Article Substrate materials that are high-temperature stable are essential for sensor devices which are applied at high temperatures. Although langasite is suggested as such a material, severe O and Ga diffusion into an O-affine deposited film was observed during annealing at high temperatures under vacuum conditions, leading to a damage of the metallization as well as a change of the properties of the substrate and finally to a failure of the device. Therefore, annealing of bare LGS (La [Formula: see text] Ga [Formula: see text] SiO [Formula: see text]) substrates at 800 [Formula: see text] C under high vacuum conditions is performed to analyze whether this pretreatment improves the suitability and stability of this material for high temperature applications in vacuum. To reveal the influence of the pretreatment on the subsequently deposited metallization, RuAl thin films are used as they are known to oxidize on LGS at high temperatures. A local study of the pretreated and metallized substrates using transmission electron microscopy reveals strong modification of the substrate surface. Micro cracks are visible. The composition of the substrate is strongly altered at those regions. Severe challenges for the application of LGS substrates under high-temperature vacuum conditions arise from these substrate damages, revealing that the pretreatment does not improve the applicability. MDPI 2015-12-19 /pmc/articles/PMC5458837/ /pubmed/28793752 http://dx.doi.org/10.3390/ma8125497 Text en © 2015 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons by Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Seifert, Marietta Rane, Gayatri K Kirbus, Benjamin Menzel, Siegfried B Gemming, Thomas Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum |
title | Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum |
title_full | Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum |
title_fullStr | Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum |
title_full_unstemmed | Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum |
title_short | Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum |
title_sort | surface effects and challenges for application of piezoelectric langasite substrates in surface acoustic wave devices caused by high temperature annealing under high vacuum |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458837/ https://www.ncbi.nlm.nih.gov/pubmed/28793752 http://dx.doi.org/10.3390/ma8125497 |
work_keys_str_mv | AT seifertmarietta surfaceeffectsandchallengesforapplicationofpiezoelectriclangasitesubstratesinsurfaceacousticwavedevicescausedbyhightemperatureannealingunderhighvacuum AT ranegayatrik surfaceeffectsandchallengesforapplicationofpiezoelectriclangasitesubstratesinsurfaceacousticwavedevicescausedbyhightemperatureannealingunderhighvacuum AT kirbusbenjamin surfaceeffectsandchallengesforapplicationofpiezoelectriclangasitesubstratesinsurfaceacousticwavedevicescausedbyhightemperatureannealingunderhighvacuum AT menzelsiegfriedb surfaceeffectsandchallengesforapplicationofpiezoelectriclangasitesubstratesinsurfaceacousticwavedevicescausedbyhightemperatureannealingunderhighvacuum AT gemmingthomas surfaceeffectsandchallengesforapplicationofpiezoelectriclangasitesubstratesinsurfaceacousticwavedevicescausedbyhightemperatureannealingunderhighvacuum |