Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum

Substrate materials that are high-temperature stable are essential for sensor devices which are applied at high temperatures. Although langasite is suggested as such a material, severe O and Ga diffusion into an O-affine deposited film was observed during annealing at high temperatures under vacuum...

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Detalles Bibliográficos
Autores principales: Seifert, Marietta, Rane, Gayatri K, Kirbus, Benjamin, Menzel, Siegfried B, Gemming, Thomas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458837/
https://www.ncbi.nlm.nih.gov/pubmed/28793752
http://dx.doi.org/10.3390/ma8125497

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