An All Oxide-Based Imperceptible Thin-Film Transistor with Humidity Sensing Properties

We have examined the effects of oxygen content and thickness in sputtered InSnO (ITO) electrodes, especially for the application of imperceptible amorphous-InGaZnO (a-IGZO) thin-film transistors (TFTs) in humidity sensors. The imperceptible a-IGZO TFT with 50-nm ITO electrodes deposited at Ar:O(2) =...

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Detalles Bibliográficos
Autores principales: Kim, Kyung Su, Ahn, Cheol Hyoun, Kang, Won Jun, Cho, Sung Woon, Jung, Sung Hyeon, Yoon, Dae Ho, Cho, Hyung Koun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458990/
https://www.ncbi.nlm.nih.gov/pubmed/28772888
http://dx.doi.org/10.3390/ma10050530

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5458990/
https://www.ncbi.nlm.nih.gov/pubmed/28772888
http://dx.doi.org/10.3390/ma10050530

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