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Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings

MAX phases (M = transition metal, A = A-group element, and X = C/N) are of special interest because they possess a unique combination of the advantages of both metals and ceramics. Most attention is attracted to the ternary carbide Cr(2)AlC because of its excellent high-temperature oxidation, as wel...

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Autores principales: Obrosov, Aleksei, Gulyaev, Roman, Zak, Andrzej, Ratzke, Markus, Naveed, Muhammad, Dudzinski, Wlodzimierz, Weiß, Sabine
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5459136/
https://www.ncbi.nlm.nih.gov/pubmed/28772516
http://dx.doi.org/10.3390/ma10020156
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author Obrosov, Aleksei
Gulyaev, Roman
Zak, Andrzej
Ratzke, Markus
Naveed, Muhammad
Dudzinski, Wlodzimierz
Weiß, Sabine
author_facet Obrosov, Aleksei
Gulyaev, Roman
Zak, Andrzej
Ratzke, Markus
Naveed, Muhammad
Dudzinski, Wlodzimierz
Weiß, Sabine
author_sort Obrosov, Aleksei
collection PubMed
description MAX phases (M = transition metal, A = A-group element, and X = C/N) are of special interest because they possess a unique combination of the advantages of both metals and ceramics. Most attention is attracted to the ternary carbide Cr(2)AlC because of its excellent high-temperature oxidation, as well as hot corrosion resistance. Despite lots of publications, up to now the influence of bias voltage on the chemical bonding structure, surface morphology, and mechanical properties of the film is still not well understood. In the current study, Cr-Al-C films were deposited on silicon wafers (100) and Inconel 718 super alloy by dc magnetron sputtering with different substrate bias voltages and investigated using Scanning Electron Microscopy (SEM), X-ray Photoelectron Spectroscopy (XPS), X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), and nanoindentation. Transmission Electron Microscopy (TEM) was used to analyze the correlation between the growth of the films and the coating microstructure. The XPS results confirm the presence of Cr(2)AlC MAX phase due to a negative shift of 0.6–0.9 eV of the Al2p to pure aluminum carbide peak. The XRD results reveal the presence of Cr(2)AlC MAX Phase and carbide phases, as well as intermetallic AlCr(2). The film thickness decreases from 8.95 to 6.98 µm with increasing bias voltage. The coatings deposited at 90 V exhibit the lowest roughness (33 nm) and granular size (76 nm) combined with the highest hardness (15.9 GPa). The ratio of Al carbide to carbide-like carbon state changes from 0.12 to 0.22 and correlates with the mechanical properties of the coatings. TEM confirms the columnar structure, with a nanocrystalline substructure, of the films.
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spelling pubmed-54591362017-07-28 Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings Obrosov, Aleksei Gulyaev, Roman Zak, Andrzej Ratzke, Markus Naveed, Muhammad Dudzinski, Wlodzimierz Weiß, Sabine Materials (Basel) Article MAX phases (M = transition metal, A = A-group element, and X = C/N) are of special interest because they possess a unique combination of the advantages of both metals and ceramics. Most attention is attracted to the ternary carbide Cr(2)AlC because of its excellent high-temperature oxidation, as well as hot corrosion resistance. Despite lots of publications, up to now the influence of bias voltage on the chemical bonding structure, surface morphology, and mechanical properties of the film is still not well understood. In the current study, Cr-Al-C films were deposited on silicon wafers (100) and Inconel 718 super alloy by dc magnetron sputtering with different substrate bias voltages and investigated using Scanning Electron Microscopy (SEM), X-ray Photoelectron Spectroscopy (XPS), X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), and nanoindentation. Transmission Electron Microscopy (TEM) was used to analyze the correlation between the growth of the films and the coating microstructure. The XPS results confirm the presence of Cr(2)AlC MAX phase due to a negative shift of 0.6–0.9 eV of the Al2p to pure aluminum carbide peak. The XRD results reveal the presence of Cr(2)AlC MAX Phase and carbide phases, as well as intermetallic AlCr(2). The film thickness decreases from 8.95 to 6.98 µm with increasing bias voltage. The coatings deposited at 90 V exhibit the lowest roughness (33 nm) and granular size (76 nm) combined with the highest hardness (15.9 GPa). The ratio of Al carbide to carbide-like carbon state changes from 0.12 to 0.22 and correlates with the mechanical properties of the coatings. TEM confirms the columnar structure, with a nanocrystalline substructure, of the films. MDPI 2017-02-10 /pmc/articles/PMC5459136/ /pubmed/28772516 http://dx.doi.org/10.3390/ma10020156 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Obrosov, Aleksei
Gulyaev, Roman
Zak, Andrzej
Ratzke, Markus
Naveed, Muhammad
Dudzinski, Wlodzimierz
Weiß, Sabine
Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings
title Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings
title_full Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings
title_fullStr Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings
title_full_unstemmed Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings
title_short Chemical and Morphological Characterization of Magnetron Sputtered at Different Bias Voltages Cr-Al-C Coatings
title_sort chemical and morphological characterization of magnetron sputtered at different bias voltages cr-al-c coatings
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5459136/
https://www.ncbi.nlm.nih.gov/pubmed/28772516
http://dx.doi.org/10.3390/ma10020156
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