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Study of Thermal Electrical Modified Etching for Glass and Its Application in Structure Etching

In this work, an accelerating etching method for glass named thermal electrical modified etching (TEM etching) is investigated. Based on the identification of the effect in anodic bonding, a novel method for glass structure micromachining is proposed using TEM etching. To validate the method, TEM-et...

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Detalles Bibliográficos
Autores principales:	Zhan, Zhan, Li, Wei, Yu, Lingke, Wang, Lingyun, Sun, Daoheng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5459186/ https://www.ncbi.nlm.nih.gov/pubmed/28772521 http://dx.doi.org/10.3390/ma10020158

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