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Study of Thermal Electrical Modified Etching for Glass and Its Application in Structure Etching
In this work, an accelerating etching method for glass named thermal electrical modified etching (TEM etching) is investigated. Based on the identification of the effect in anodic bonding, a novel method for glass structure micromachining is proposed using TEM etching. To validate the method, TEM-et...
Autores principales: | Zhan, Zhan, Li, Wei, Yu, Lingke, Wang, Lingyun, Sun, Daoheng |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5459186/ https://www.ncbi.nlm.nih.gov/pubmed/28772521 http://dx.doi.org/10.3390/ma10020158 |
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