Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection

The integration of a 50-nm-thick layer of an innovative sensitive material on microsensors has been developed based on silicon micro-hotplates. In this study, integration of ZnO:Ga via radio-frequency (RF) sputtering has been successfully combined with a low cost and reliable stencil mask technique...

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Detalles Bibliográficos
Autores principales: Presmanes, Lionel, Thimont, Yohann, Chapelle, Audrey, Blanc, Frédéric, Talhi, Chabane, Bonningue, Corine, Barnabé, Antoine, Menini, Philippe, Tailhades, Philippe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5469660/
https://www.ncbi.nlm.nih.gov/pubmed/28481258
http://dx.doi.org/10.3390/s17051055

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