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Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics
The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5470470/ https://www.ncbi.nlm.nih.gov/pubmed/28489040 http://dx.doi.org/10.3390/s17051080 |
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author | Abels, Claudio Mastronardi, Vincenzo Mariano Guido, Francesco Dattoma, Tommaso Qualtieri, Antonio Megill, William M. De Vittorio, Massimo Rizzi, Francesco |
author_facet | Abels, Claudio Mastronardi, Vincenzo Mariano Guido, Francesco Dattoma, Tommaso Qualtieri, Antonio Megill, William M. De Vittorio, Massimo Rizzi, Francesco |
author_sort | Abels, Claudio |
collection | PubMed |
description | The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, Si [Formula: see text] N [Formula: see text] /Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described. |
format | Online Article Text |
id | pubmed-5470470 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-54704702017-06-16 Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics Abels, Claudio Mastronardi, Vincenzo Mariano Guido, Francesco Dattoma, Tommaso Qualtieri, Antonio Megill, William M. De Vittorio, Massimo Rizzi, Francesco Sensors (Basel) Review The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, Si [Formula: see text] N [Formula: see text] /Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described. MDPI 2017-05-10 /pmc/articles/PMC5470470/ /pubmed/28489040 http://dx.doi.org/10.3390/s17051080 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Review Abels, Claudio Mastronardi, Vincenzo Mariano Guido, Francesco Dattoma, Tommaso Qualtieri, Antonio Megill, William M. De Vittorio, Massimo Rizzi, Francesco Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics |
title | Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics |
title_full | Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics |
title_fullStr | Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics |
title_full_unstemmed | Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics |
title_short | Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics |
title_sort | nitride-based materials for flexible mems tactile and flow sensors in robotics |
topic | Review |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5470470/ https://www.ncbi.nlm.nih.gov/pubmed/28489040 http://dx.doi.org/10.3390/s17051080 |
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