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Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for...

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Detalles Bibliográficos
Autores principales:	Abels, Claudio, Mastronardi, Vincenzo Mariano, Guido, Francesco, Dattoma, Tommaso, Qualtieri, Antonio, Megill, William M., De Vittorio, Massimo, Rizzi, Francesco
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5470470/ https://www.ncbi.nlm.nih.gov/pubmed/28489040 http://dx.doi.org/10.3390/s17051080

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