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Squeeze-Film Air Damping of a Five-Axis Electrostatic Bearing for Rotary Micromotors
Air-film damping, which dominates over other losses, plays a significant role in the dynamic response of many micro-fabricated devices with a movable mass suspended by various bearing mechanisms. Modeling the damping characteristics accurately will be greatly helpful to the bearing design, control,...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5470795/ https://www.ncbi.nlm.nih.gov/pubmed/28505089 http://dx.doi.org/10.3390/s17051119 |