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A modified squeeze equation for predicting the filling ratio of nanoimprint lithography

A numerical method using the modified squeeze model is proposed in this paper in order to overcome the limitation of the established squeeze equation and obtain filling ratios for nanoimprint lithography (NIL). Because the imprinting velocity is overestimated when the ratio of indenter width to poly...

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Detalles Bibliográficos
Autores principales: Ryu, JiHyeong, Lee, Ho, Lee, Sang-Ho, Lim, HyungJun, Lee, JaeJong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Singapore 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5487822/
https://www.ncbi.nlm.nih.gov/pubmed/28680797
http://dx.doi.org/10.1186/s40580-017-0108-z

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