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Nanomesh electrode on MgZnO-based metal-semiconductor-metal ultraviolet photodetectors
In this work, the nano-scaled mesh electrodes are fabricated by obliquely depositing metals through the highly ordered polystyrene nanosphere mask. Furthermore, the intrinsic MgZnO film is deposited as the absorption layer for the metal-semiconductor-metal ultraviolet photodetectors (MSM-UV-PDs) usi...
Autores principales: | Lee, Ching-Ting, Lin, Heng-Yu, Tseng, Chun-Yen |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2015
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5490653/ https://www.ncbi.nlm.nih.gov/pubmed/26324247 http://dx.doi.org/10.1038/srep13705 |
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