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Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy

In this paper, we apply a digital holographic microscope (DHM) in conjunction with stroboscopic acquisition synchronization. Here, the temperature-dependent decrease of the first resonance frequency (S(1)(T)) and Young’s elastic modulus (E(1)(T)) of silicon micromechanical cantilever sensors (MCSs)...

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Detalles Bibliográficos
Autores principales:	Zakerin, Marjan, Novak, Antonin, Toda, Masaya, Emery, Yves, Natalio, Filipe, Butt, Hans-Jürgen, Berger, Rüdiger
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5490691/ https://www.ncbi.nlm.nih.gov/pubmed/28545236 http://dx.doi.org/10.3390/s17061191

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