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Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing

P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors we...

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Autores principales: Presmanes, Lionel, Thimont, Yohann, el Younsi, Imane, Chapelle, Audrey, Blanc, Frédéric, Talhi, Chabane, Bonningue, Corine, Barnabé, Antoine, Menini, Philippe, Tailhades, Philippe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492108/
https://www.ncbi.nlm.nih.gov/pubmed/28621738
http://dx.doi.org/10.3390/s17061409
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author Presmanes, Lionel
Thimont, Yohann
el Younsi, Imane
Chapelle, Audrey
Blanc, Frédéric
Talhi, Chabane
Bonningue, Corine
Barnabé, Antoine
Menini, Philippe
Tailhades, Philippe
author_facet Presmanes, Lionel
Thimont, Yohann
el Younsi, Imane
Chapelle, Audrey
Blanc, Frédéric
Talhi, Chabane
Bonningue, Corine
Barnabé, Antoine
Menini, Philippe
Tailhades, Philippe
author_sort Presmanes, Lionel
collection PubMed
description P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors were tested with variable thermal sequences under carbon monoxide (CO), ammonia (NH(3)), acetaldehyde (C(2)H(4)O), and nitrogen dioxide (NO(2)) which are among the main pollutant gases measured by metal-oxide (MOS) gas sensors for air quality control systems in automotive cabins. Because the microheaters were designed on a membrane, it was then possible to generate very rapid temperature variations (from room temperature to 550 °C in only 50 ms) and a rapid temperature cycling mode could be applied. This measurement mode allowed a significant improvement of the sensor response under 2 and 5 ppm of acetaldehyde.
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spelling pubmed-54921082017-07-03 Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing Presmanes, Lionel Thimont, Yohann el Younsi, Imane Chapelle, Audrey Blanc, Frédéric Talhi, Chabane Bonningue, Corine Barnabé, Antoine Menini, Philippe Tailhades, Philippe Sensors (Basel) Article P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors were tested with variable thermal sequences under carbon monoxide (CO), ammonia (NH(3)), acetaldehyde (C(2)H(4)O), and nitrogen dioxide (NO(2)) which are among the main pollutant gases measured by metal-oxide (MOS) gas sensors for air quality control systems in automotive cabins. Because the microheaters were designed on a membrane, it was then possible to generate very rapid temperature variations (from room temperature to 550 °C in only 50 ms) and a rapid temperature cycling mode could be applied. This measurement mode allowed a significant improvement of the sensor response under 2 and 5 ppm of acetaldehyde. MDPI 2017-06-16 /pmc/articles/PMC5492108/ /pubmed/28621738 http://dx.doi.org/10.3390/s17061409 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Presmanes, Lionel
Thimont, Yohann
el Younsi, Imane
Chapelle, Audrey
Blanc, Frédéric
Talhi, Chabane
Bonningue, Corine
Barnabé, Antoine
Menini, Philippe
Tailhades, Philippe
Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing
title Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing
title_full Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing
title_fullStr Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing
title_full_unstemmed Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing
title_short Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing
title_sort integration of p-cuo thin sputtered layers onto microsensor platforms for gas sensing
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492108/
https://www.ncbi.nlm.nih.gov/pubmed/28621738
http://dx.doi.org/10.3390/s17061409
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