Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing

P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors we...

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Detalles Bibliográficos
Autores principales: Presmanes, Lionel, Thimont, Yohann, el Younsi, Imane, Chapelle, Audrey, Blanc, Frédéric, Talhi, Chabane, Bonningue, Corine, Barnabé, Antoine, Menini, Philippe, Tailhades, Philippe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492108/
https://www.ncbi.nlm.nih.gov/pubmed/28621738
http://dx.doi.org/10.3390/s17061409

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