Aspheric Surface Measurement Using Capacitive Sensors

This paper proposes a new method for the measurement of spherical coordinates by using capacitive sensors as a non-contact probe solution of measurement of aspheric surfaces. The measurement of the average effect of the capacitive probe and the influence of capacitive probe tilting were studied with...

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Detalles Bibliográficos
Autores principales: Yuan, Daocheng, Zhao, Huiying, Tao, Xin, Li, Shaobo, Zhu, Xueliang, Zhang, Chupeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492823/
https://www.ncbi.nlm.nih.gov/pubmed/28604613
http://dx.doi.org/10.3390/s17061355
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author Yuan, Daocheng
Zhao, Huiying
Tao, Xin
Li, Shaobo
Zhu, Xueliang
Zhang, Chupeng
author_facet Yuan, Daocheng
Zhao, Huiying
Tao, Xin
Li, Shaobo
Zhu, Xueliang
Zhang, Chupeng
author_sort Yuan, Daocheng
collection PubMed
description This paper proposes a new method for the measurement of spherical coordinates by using capacitive sensors as a non-contact probe solution of measurement of aspheric surfaces. The measurement of the average effect of the capacitive probe and the influence of capacitive probe tilting were studied with respect to an eccentric spherical surface. Based on the tested characteristic curve of the average effect of the sphere and probe, it was found that nonlinear and linear compensation resulted in high measurement accuracy. The capacitance probe was found to be trying to fulfill a need for performing nm-level precision measurement of aspheric electromagnetic surfaces.
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spelling pubmed-54928232017-07-03 Aspheric Surface Measurement Using Capacitive Sensors Yuan, Daocheng Zhao, Huiying Tao, Xin Li, Shaobo Zhu, Xueliang Zhang, Chupeng Sensors (Basel) Article This paper proposes a new method for the measurement of spherical coordinates by using capacitive sensors as a non-contact probe solution of measurement of aspheric surfaces. The measurement of the average effect of the capacitive probe and the influence of capacitive probe tilting were studied with respect to an eccentric spherical surface. Based on the tested characteristic curve of the average effect of the sphere and probe, it was found that nonlinear and linear compensation resulted in high measurement accuracy. The capacitance probe was found to be trying to fulfill a need for performing nm-level precision measurement of aspheric electromagnetic surfaces. MDPI 2017-06-11 /pmc/articles/PMC5492823/ /pubmed/28604613 http://dx.doi.org/10.3390/s17061355 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yuan, Daocheng
Zhao, Huiying
Tao, Xin
Li, Shaobo
Zhu, Xueliang
Zhang, Chupeng
Aspheric Surface Measurement Using Capacitive Sensors
title Aspheric Surface Measurement Using Capacitive Sensors
title_full Aspheric Surface Measurement Using Capacitive Sensors
title_fullStr Aspheric Surface Measurement Using Capacitive Sensors
title_full_unstemmed Aspheric Surface Measurement Using Capacitive Sensors
title_short Aspheric Surface Measurement Using Capacitive Sensors
title_sort aspheric surface measurement using capacitive sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5492823/
https://www.ncbi.nlm.nih.gov/pubmed/28604613
http://dx.doi.org/10.3390/s17061355
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AT taoxin asphericsurfacemeasurementusingcapacitivesensors
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AT zhuxueliang asphericsurfacemeasurementusingcapacitivesensors
AT zhangchupeng asphericsurfacemeasurementusingcapacitivesensors

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