Re-distribution of oxygen at the interface between γ-Al(2)O(3) and TiN

Interface of TiN electrode with γ-Al(2)O(3) layers was studied using near edge X-ray absorption fine structure, conventional X-ray photoelectron spectroscopy and photoelectron spectroscopy with high energies. Despite the atomic-layer deposited Al(2)O(3) being converted into thermodynamically-stable...

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Detalles Bibliográficos
Autores principales: Filatova, E. O., Konashuk, A. S., Sakhonenkov, S. S., Sokolov, A. A., Afanas’ev, V. V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5495785/
https://www.ncbi.nlm.nih.gov/pubmed/28674397
http://dx.doi.org/10.1038/s41598-017-04804-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5495785/
https://www.ncbi.nlm.nih.gov/pubmed/28674397
http://dx.doi.org/10.1038/s41598-017-04804-4

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