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Re-distribution of oxygen at the interface between γ-Al(2)O(3) and TiN
Interface of TiN electrode with γ-Al(2)O(3) layers was studied using near edge X-ray absorption fine structure, conventional X-ray photoelectron spectroscopy and photoelectron spectroscopy with high energies. Despite the atomic-layer deposited Al(2)O(3) being converted into thermodynamically-stable...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5495785/ https://www.ncbi.nlm.nih.gov/pubmed/28674397 http://dx.doi.org/10.1038/s41598-017-04804-4 |