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Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses

Periodic structures of alternating amorphous-crystalline fringes have been fabricated in silicon using repetitive femtosecond laser exposure (800 nm wavelength and 120 fs duration). The method is based on the interference of the incident laser light with far- and near-field scattered light, leading...

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Autores principales: Fuentes-Edfuf, Yasser, Garcia-Lechuga, Mario, Puerto, Daniel, Florian, Camilo, Garcia-Leis, Adianez, Sanchez-Cortes, Santiago, Solis, Javier, Siegel, Jan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5496901/
https://www.ncbi.nlm.nih.gov/pubmed/28676639
http://dx.doi.org/10.1038/s41598-017-04891-3
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author Fuentes-Edfuf, Yasser
Garcia-Lechuga, Mario
Puerto, Daniel
Florian, Camilo
Garcia-Leis, Adianez
Sanchez-Cortes, Santiago
Solis, Javier
Siegel, Jan
author_facet Fuentes-Edfuf, Yasser
Garcia-Lechuga, Mario
Puerto, Daniel
Florian, Camilo
Garcia-Leis, Adianez
Sanchez-Cortes, Santiago
Solis, Javier
Siegel, Jan
author_sort Fuentes-Edfuf, Yasser
collection PubMed
description Periodic structures of alternating amorphous-crystalline fringes have been fabricated in silicon using repetitive femtosecond laser exposure (800 nm wavelength and 120 fs duration). The method is based on the interference of the incident laser light with far- and near-field scattered light, leading to local melting at the interference maxima, as demonstrated by femtosecond microscopy. Exploiting this strategy, lines of highly regular amorphous fringes can be written. The fringes have been characterized in detail using optical microscopy combined modelling, which enables a determination of the three-dimensional shape of individual fringes. 2D micro-Raman spectroscopy reveals that the space between amorphous fringes remains crystalline. We demonstrate that the fringe period can be tuned over a range of 410 nm – 13 µm by changing the angle of incidence and inverting the beam scan direction. Fine control over the lateral dimensions, thickness, surface depression and optical contrast of the fringes is obtained via adjustment of pulse number, fluence and spot size. Large-area, highly homogeneous gratings composed of amorphous fringes with micrometer width and millimeter length can readily be fabricated. The here presented fabrication technique is expected to have applications in the fields of optics, nanoelectronics, and mechatronics and should be applicable to other materials.
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spelling pubmed-54969012017-07-10 Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses Fuentes-Edfuf, Yasser Garcia-Lechuga, Mario Puerto, Daniel Florian, Camilo Garcia-Leis, Adianez Sanchez-Cortes, Santiago Solis, Javier Siegel, Jan Sci Rep Article Periodic structures of alternating amorphous-crystalline fringes have been fabricated in silicon using repetitive femtosecond laser exposure (800 nm wavelength and 120 fs duration). The method is based on the interference of the incident laser light with far- and near-field scattered light, leading to local melting at the interference maxima, as demonstrated by femtosecond microscopy. Exploiting this strategy, lines of highly regular amorphous fringes can be written. The fringes have been characterized in detail using optical microscopy combined modelling, which enables a determination of the three-dimensional shape of individual fringes. 2D micro-Raman spectroscopy reveals that the space between amorphous fringes remains crystalline. We demonstrate that the fringe period can be tuned over a range of 410 nm – 13 µm by changing the angle of incidence and inverting the beam scan direction. Fine control over the lateral dimensions, thickness, surface depression and optical contrast of the fringes is obtained via adjustment of pulse number, fluence and spot size. Large-area, highly homogeneous gratings composed of amorphous fringes with micrometer width and millimeter length can readily be fabricated. The here presented fabrication technique is expected to have applications in the fields of optics, nanoelectronics, and mechatronics and should be applicable to other materials. Nature Publishing Group UK 2017-07-04 /pmc/articles/PMC5496901/ /pubmed/28676639 http://dx.doi.org/10.1038/s41598-017-04891-3 Text en © The Author(s) 2017 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Fuentes-Edfuf, Yasser
Garcia-Lechuga, Mario
Puerto, Daniel
Florian, Camilo
Garcia-Leis, Adianez
Sanchez-Cortes, Santiago
Solis, Javier
Siegel, Jan
Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_full Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_fullStr Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_full_unstemmed Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_short Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_sort coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5496901/
https://www.ncbi.nlm.nih.gov/pubmed/28676639
http://dx.doi.org/10.1038/s41598-017-04891-3
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