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Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses

Periodic structures of alternating amorphous-crystalline fringes have been fabricated in silicon using repetitive femtosecond laser exposure (800 nm wavelength and 120 fs duration). The method is based on the interference of the incident laser light with far- and near-field scattered light, leading...

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Detalles Bibliográficos
Autores principales:	Fuentes-Edfuf, Yasser, Garcia-Lechuga, Mario, Puerto, Daniel, Florian, Camilo, Garcia-Leis, Adianez, Sanchez-Cortes, Santiago, Solis, Javier, Siegel, Jan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5496901/ https://www.ncbi.nlm.nih.gov/pubmed/28676639 http://dx.doi.org/10.1038/s41598-017-04891-3

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