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Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

ABSTRACT: Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In(2)O(3−x)S(x) oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t...

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Detalles Bibliográficos
Autores principales:	Biegger, Felix, Jungwirth, Felix, Seifner, Michael Stanislaus, Rameshan, Christoph, Barth, Sven
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer Vienna 2017
Materias:	Original Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5504136/ https://www.ncbi.nlm.nih.gov/pubmed/28751793 http://dx.doi.org/10.1007/s00706-017-1980-2

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