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Crystallinity and Sub-Band Gap Absorption of Femtosecond-Laser Hyperdoped Silicon Formed in Different N-Containing Gas Mixtures

Femtosecond (fs)-laser hyperdoped silicon has aroused great interest for applications in infrared photodetectors due to its special properties. Crystallinity and optical absorption influenced by co-hyperdoped nitrogen in surface microstructured silicon, prepared by fs-laser irradiation in gas mixtur...

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Detalles Bibliográficos
Autores principales:	Sun, Haibin, Xiao, Jiamin, Zhu, Suwan, Hu, Yue, Feng, Guojin, Zhuang, Jun, Zhao, Li
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5506947/ https://www.ncbi.nlm.nih.gov/pubmed/28772709 http://dx.doi.org/10.3390/ma10040351

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