SU-8 free-standing microfluidic probes

We present a process for fabrication of free-standing SU-8 probes, with a dry, mechanical release of the final micro-devices. The process utilizes the thermal release tape, a commonly used cleanroom material, for facile heat-release from the sacrificial layer. For characterization of the SU-8 microf...

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Detalles Bibliográficos
Autores principales: Kim, A. A., Kustanovich, K., Baratian, D., Ainla, A., Shaali, M., Jeffries, G. D. M., Jesorka, A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: AIP Publishing LLC 2017
Materias:
Regular Articles
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5533480/
https://www.ncbi.nlm.nih.gov/pubmed/28798844
http://dx.doi.org/10.1063/1.4975026

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5533480/
https://www.ncbi.nlm.nih.gov/pubmed/28798844
http://dx.doi.org/10.1063/1.4975026

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