Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment

Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF(4) plasma was incorporated to improve the material quality of MgO films. Multiple material analyses incl...

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Autores principales: Kao, Chyuan-Haur, Chang, Chia Lung, Su, Wei Ming, Chen, Yu Tzu, Lu, Chien Cheng, Lee, Yu Shan, Hong, Chen Hao, Lin, Chan-Yu, Chen, Hsiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5543133/
https://www.ncbi.nlm.nih.gov/pubmed/28775264
http://dx.doi.org/10.1038/s41598-017-07699-3
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author Kao, Chyuan-Haur
Chang, Chia Lung
Su, Wei Ming
Chen, Yu Tzu
Lu, Chien Cheng
Lee, Yu Shan
Hong, Chen Hao
Lin, Chan-Yu
Chen, Hsiang
author_facet Kao, Chyuan-Haur
Chang, Chia Lung
Su, Wei Ming
Chen, Yu Tzu
Lu, Chien Cheng
Lee, Yu Shan
Hong, Chen Hao
Lin, Chan-Yu
Chen, Hsiang
author_sort Kao, Chyuan-Haur
collection PubMed
description Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF(4) plasma was incorporated to improve the material quality of MgO films. Multiple material analyses including FESEM, XRD, AFM, and SIMS indicate that plasma treatment might enhance the crystallization and increase the grain size. Therefore, the sensing behaviors in terms of sensitivity, linearity, hysteresis effects, and drift rates might be improved. MgO-based EIS membranes with CF(4) plasma treatment show promise for future industrial biosensing applications.
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spelling pubmed-55431332017-08-07 Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment Kao, Chyuan-Haur Chang, Chia Lung Su, Wei Ming Chen, Yu Tzu Lu, Chien Cheng Lee, Yu Shan Hong, Chen Hao Lin, Chan-Yu Chen, Hsiang Sci Rep Article Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF(4) plasma was incorporated to improve the material quality of MgO films. Multiple material analyses including FESEM, XRD, AFM, and SIMS indicate that plasma treatment might enhance the crystallization and increase the grain size. Therefore, the sensing behaviors in terms of sensitivity, linearity, hysteresis effects, and drift rates might be improved. MgO-based EIS membranes with CF(4) plasma treatment show promise for future industrial biosensing applications. Nature Publishing Group UK 2017-08-03 /pmc/articles/PMC5543133/ /pubmed/28775264 http://dx.doi.org/10.1038/s41598-017-07699-3 Text en © The Author(s) 2017 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Kao, Chyuan-Haur
Chang, Chia Lung
Su, Wei Ming
Chen, Yu Tzu
Lu, Chien Cheng
Lee, Yu Shan
Hong, Chen Hao
Lin, Chan-Yu
Chen, Hsiang
Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment
title Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment
title_full Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment
title_fullStr Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment
title_full_unstemmed Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment
title_short Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment
title_sort magnesium oxide (mgo) ph-sensitive sensing membrane in electrolyte-insulator-semiconductor structures with cf(4) plasma treatment
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5543133/
https://www.ncbi.nlm.nih.gov/pubmed/28775264
http://dx.doi.org/10.1038/s41598-017-07699-3
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