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Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF(4) Plasma Treatment

Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF(4) plasma was incorporated to improve the material quality of MgO films. Multiple material analyses incl...

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Detalles Bibliográficos
Autores principales:	Kao, Chyuan-Haur, Chang, Chia Lung, Su, Wei Ming, Chen, Yu Tzu, Lu, Chien Cheng, Lee, Yu Shan, Hong, Chen Hao, Lin, Chan-Yu, Chen, Hsiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5543133/ https://www.ncbi.nlm.nih.gov/pubmed/28775264 http://dx.doi.org/10.1038/s41598-017-07699-3

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