Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (Ag(Zn)) and the formation of the Ag aggregations (Ag(0)) in the ZnO matrix...

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Detalles Bibliográficos
Autores principales: Liu, Fang-Cheng, Li, Jyun-Yong, Chen, Tai-Hong, Chang, Chun-How, Lee, Ching-Ting, Hsiao, Wei-Hua, Liu, Day-Shan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5551840/
https://www.ncbi.nlm.nih.gov/pubmed/28773159
http://dx.doi.org/10.3390/ma10070797
Descripción
Sumario:Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (Ag(Zn)) and the formation of the Ag aggregations (Ag(0)) in the ZnO matrix were investigated from XRD, Raman scattering, and XPS measurements. The Ag-ZnO co-sputtered film behaving like a p-type conduction was achievable after annealing at 350 °C under air ambient for 1 h.

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