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Amorphous Silicon Nanowires Grown on Silicon Oxide Film by Annealing
In this paper, amorphous silicon nanowires (α-SiNWs) were synthesized on (100) Si substrate with silicon oxide film by Cu catalyst-driven solid-liquid-solid mechanism (SLS) during annealing process (1080 °C for 30 min under Ar/H(2) atmosphere). Micro size Cu pattern fabrication decided whether α-SiN...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5552620/ https://www.ncbi.nlm.nih.gov/pubmed/28799118 http://dx.doi.org/10.1186/s11671-017-2251-1 |