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Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 times grea...
Autores principales: | Liu, Zhaowu, Li, Wenhao, Bayanheshig, Li, Xiaotian, Jiang, Shan, Song, Ying, Lv, Qiang |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5558020/ https://www.ncbi.nlm.nih.gov/pubmed/28811559 http://dx.doi.org/10.1038/s41598-017-07741-4 |
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