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A patterned single layer graphene resistance temperature sensor

Micro-fabricated single-layer graphenes (SLGs) on a silicon dioxide (SiO(2))/Si substrate, a silicon nitride (SiN) membrane, and a suspended architecture are presented for their use as temperature sensors. These graphene temperature sensors act as resistance temperature detectors, showing a quadrati...

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Detalles Bibliográficos
Autores principales:	Davaji, Benyamin, Cho, Hak Dong, Malakoutian, Mohamadali, Lee, Jong-Kwon, Panin, Gennady, Kang, Tae Won, Lee, Chung Hoon
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5562788/ https://www.ncbi.nlm.nih.gov/pubmed/28821773 http://dx.doi.org/10.1038/s41598-017-08967-y

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