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Manipulating the adhesion of electroless nickel-phosphorus film on silicon wafers by silane compound modification and rapid thermal annealing

In this study, the effect of 3-2-(2-aminoethylamino) ethylamino propyl trimethoxysilane (ETAS) modification and post rapid thermal annealing (RTA) treatment on the adhesion of electroless plated nickel-phosphorus (ELP Ni-P) film on polyvinyl alcohol-capped palladium nanoclusters (PVA-Pd) catalyzed s...

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Detalles Bibliográficos
Autores principales:	Hsu, Chin-Wei, Wang, Wei-Yen, Wang, Kuan-Ting, Chen, Hou-An, Wei, Tzu-Chien
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5574985/ https://www.ncbi.nlm.nih.gov/pubmed/28851883 http://dx.doi.org/10.1038/s41598-017-08639-x

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