Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering

We investigated the characteristics of carrier transport and crystallographic orientation distribution in 500-nm-thick Al-doped ZnO (AZO) polycrystalline films to achieve high-Hall-mobility AZO films. The AZO films were deposited on glass substrates at 200 °C by direct-current, radio-frequency, or r...

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Detalles Bibliográficos
Autores principales: Nomoto, Junichi, Inaba, Katsuhiko, Kobayashi, Shintaro, Watanabe, Takeshi, Makino, Hisao, Yamamoto, Tetsuya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5578282/
https://www.ncbi.nlm.nih.gov/pubmed/28792439
http://dx.doi.org/10.3390/ma10080916

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