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High-brightness Cs focused ion beam from a cold-atomic-beam ion source
We present measurements of focal spot size and brightness in a focused ion beam system utilizing a laser-cooled atomic beam source of Cs ions. Spot sizes as small as (2.1 ± 0.2) nm (one standard deviation) and reduced brightness values as high as (2.4 ± 0.1) × 10(7) A m(−2) Sr(−1) eV(−1) are observe...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5586654/ https://www.ncbi.nlm.nih.gov/pubmed/28890941 http://dx.doi.org/10.1088/2399-1984/aa6a48 |