Cargando…
Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films
A multi-aperture shower design is reported to improve the transverse uniformity of GdYBCO superconducting films on the template of sputtered-LaMnO(3)/epitaxial-MgO/IBAD-MgO/solution deposition planarization (SDP)-Y(2)O(3)-buffered Hastelloy tapes. The GdYBCO films were prepared by the metal organic...
Autores principales: | , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5615742/ https://www.ncbi.nlm.nih.gov/pubmed/28914793 http://dx.doi.org/10.3390/ma10091088 |
_version_ | 1783266656767705088 |
---|---|
author | Zhao, Ruipeng Liu, Qing Xia, Yudong Zhang, Fei Lu, Yuming Cai, Chuanbing Tao, Bowan Li, Yanrong |
author_facet | Zhao, Ruipeng Liu, Qing Xia, Yudong Zhang, Fei Lu, Yuming Cai, Chuanbing Tao, Bowan Li, Yanrong |
author_sort | Zhao, Ruipeng |
collection | PubMed |
description | A multi-aperture shower design is reported to improve the transverse uniformity of GdYBCO superconducting films on the template of sputtered-LaMnO(3)/epitaxial-MgO/IBAD-MgO/solution deposition planarization (SDP)-Y(2)O(3)-buffered Hastelloy tapes. The GdYBCO films were prepared by the metal organic chemical vapor deposition (MOCVD) process. The transverse uniformities of structure, morphology, thickness, and performance were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), step profiler, and the standard four-probe method using the criteria of 1 μV/cm, respectively. Through adopting the multi-aperture shower instead of the slit shower, measurement by step profiler revealed that the thickness difference between the middle and the edges based on the slit shower design was well eliminated. Characterization by SEM showed that a GdYBCO film with a smooth surface was successfully prepared. Moreover, the transport critical current density (J(c)) of its middle and edge positions at 77 K and self-field were found to be over 5 MA/cm(2) through adopting the micro-bridge four-probe method. |
format | Online Article Text |
id | pubmed-5615742 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-56157422017-09-28 Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films Zhao, Ruipeng Liu, Qing Xia, Yudong Zhang, Fei Lu, Yuming Cai, Chuanbing Tao, Bowan Li, Yanrong Materials (Basel) Article A multi-aperture shower design is reported to improve the transverse uniformity of GdYBCO superconducting films on the template of sputtered-LaMnO(3)/epitaxial-MgO/IBAD-MgO/solution deposition planarization (SDP)-Y(2)O(3)-buffered Hastelloy tapes. The GdYBCO films were prepared by the metal organic chemical vapor deposition (MOCVD) process. The transverse uniformities of structure, morphology, thickness, and performance were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), step profiler, and the standard four-probe method using the criteria of 1 μV/cm, respectively. Through adopting the multi-aperture shower instead of the slit shower, measurement by step profiler revealed that the thickness difference between the middle and the edges based on the slit shower design was well eliminated. Characterization by SEM showed that a GdYBCO film with a smooth surface was successfully prepared. Moreover, the transport critical current density (J(c)) of its middle and edge positions at 77 K and self-field were found to be over 5 MA/cm(2) through adopting the micro-bridge four-probe method. MDPI 2017-09-15 /pmc/articles/PMC5615742/ /pubmed/28914793 http://dx.doi.org/10.3390/ma10091088 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zhao, Ruipeng Liu, Qing Xia, Yudong Zhang, Fei Lu, Yuming Cai, Chuanbing Tao, Bowan Li, Yanrong Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films |
title | Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films |
title_full | Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films |
title_fullStr | Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films |
title_full_unstemmed | Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films |
title_short | Multi-Aperture Shower Design for the Improvement of the Transverse Uniformity of MOCVD-Derived GdYBCO Films |
title_sort | multi-aperture shower design for the improvement of the transverse uniformity of mocvd-derived gdybco films |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5615742/ https://www.ncbi.nlm.nih.gov/pubmed/28914793 http://dx.doi.org/10.3390/ma10091088 |
work_keys_str_mv | AT zhaoruipeng multiapertureshowerdesignfortheimprovementofthetransverseuniformityofmocvdderivedgdybcofilms AT liuqing multiapertureshowerdesignfortheimprovementofthetransverseuniformityofmocvdderivedgdybcofilms AT xiayudong multiapertureshowerdesignfortheimprovementofthetransverseuniformityofmocvdderivedgdybcofilms AT zhangfei multiapertureshowerdesignfortheimprovementofthetransverseuniformityofmocvdderivedgdybcofilms AT luyuming multiapertureshowerdesignfortheimprovementofthetransverseuniformityofmocvdderivedgdybcofilms AT caichuanbing multiapertureshowerdesignfortheimprovementofthetransverseuniformityofmocvdderivedgdybcofilms AT taobowan multiapertureshowerdesignfortheimprovementofthetransverseuniformityofmocvdderivedgdybcofilms AT liyanrong multiapertureshowerdesignfortheimprovementofthetransverseuniformityofmocvdderivedgdybcofilms |