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Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability

The influence of diaphragm bending stiffness distribution on the stress concentration characteristics of a pressure sensing chip had been analyzed and discussed systematically. According to the analysis, a novel peninsula-island-based diaphragm structure was presented and applied to two differenet d...

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Detalles Bibliográficos
Autores principales:	Xu, Tingzhong, Lu, Dejiang, Zhao, Libo, Jiang, Zhuangde, Wang, Hongyan, Guo, Xin, Li, Zhikang, Zhou, Xiangyang, Zhao, Yulong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621370/ https://www.ncbi.nlm.nih.gov/pubmed/28846599 http://dx.doi.org/10.3390/s17091965

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