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Modelling focused electron beam induced deposition beyond Langmuir adsorption

In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion...

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Detalles Bibliográficos
Autores principales:	Sanz-Hernández, Dédalo, Fernández-Pacheco, Amalio
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2017
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5647696/ https://www.ncbi.nlm.nih.gov/pubmed/29090116 http://dx.doi.org/10.3762/bjnano.8.214

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