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On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators

Arrays of on-chip spherical glass shells of hundreds of micrometers in diameter with ultra-smooth surfaces and sub-micrometer wall thicknesses have been fabricated and have been shown to sustain optical resonance modes with high Q-factors of greater than 50 million. The resonators exhibit temperatur...

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Autores principales: Zhang, Chenchen, Cocking, Alexander, Freeman, Eugene, Liu, Zhiwen, Tadigadapa, Srinivas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5668306/
https://www.ncbi.nlm.nih.gov/pubmed/29097682
http://dx.doi.org/10.1038/s41598-017-14049-w
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author Zhang, Chenchen
Cocking, Alexander
Freeman, Eugene
Liu, Zhiwen
Tadigadapa, Srinivas
author_facet Zhang, Chenchen
Cocking, Alexander
Freeman, Eugene
Liu, Zhiwen
Tadigadapa, Srinivas
author_sort Zhang, Chenchen
collection PubMed
description Arrays of on-chip spherical glass shells of hundreds of micrometers in diameter with ultra-smooth surfaces and sub-micrometer wall thicknesses have been fabricated and have been shown to sustain optical resonance modes with high Q-factors of greater than 50 million. The resonators exhibit temperature sensitivity of −1.8 GHz K(−1) and can be configured as ultra-high sensitivity thermal sensors for a broad range of applications. By virtue of the geometry’s strong light-matter interaction, the inner surface provides an excellent on-chip sensing platform that truly opens up the possibility for reproducible, chip scale, ultra-high sensitivity microfluidic sensor arrays. As a proof of concept we demonstrate the sensitivity of the resonance frequency as water is filled inside the microspherical shell and is allowed to evaporate. By COMSOL modeling, the dependence of this interaction on glass shell thickness is elucidated and the experimentally measured sensitivities for two different shell thicknesses are explained.
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spelling pubmed-56683062017-11-15 On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators Zhang, Chenchen Cocking, Alexander Freeman, Eugene Liu, Zhiwen Tadigadapa, Srinivas Sci Rep Article Arrays of on-chip spherical glass shells of hundreds of micrometers in diameter with ultra-smooth surfaces and sub-micrometer wall thicknesses have been fabricated and have been shown to sustain optical resonance modes with high Q-factors of greater than 50 million. The resonators exhibit temperature sensitivity of −1.8 GHz K(−1) and can be configured as ultra-high sensitivity thermal sensors for a broad range of applications. By virtue of the geometry’s strong light-matter interaction, the inner surface provides an excellent on-chip sensing platform that truly opens up the possibility for reproducible, chip scale, ultra-high sensitivity microfluidic sensor arrays. As a proof of concept we demonstrate the sensitivity of the resonance frequency as water is filled inside the microspherical shell and is allowed to evaporate. By COMSOL modeling, the dependence of this interaction on glass shell thickness is elucidated and the experimentally measured sensitivities for two different shell thicknesses are explained. Nature Publishing Group UK 2017-11-02 /pmc/articles/PMC5668306/ /pubmed/29097682 http://dx.doi.org/10.1038/s41598-017-14049-w Text en © The Author(s) 2017 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Zhang, Chenchen
Cocking, Alexander
Freeman, Eugene
Liu, Zhiwen
Tadigadapa, Srinivas
On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators
title On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators
title_full On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators
title_fullStr On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators
title_full_unstemmed On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators
title_short On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators
title_sort on-chip glass microspherical shell whispering gallery mode resonators
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5668306/
https://www.ncbi.nlm.nih.gov/pubmed/29097682
http://dx.doi.org/10.1038/s41598-017-14049-w
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