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Fabrication of Ordered SnO(2) Nanostructures with Enhanced Humidity Sensing Performance

Ordered SnO(2) nanostructures were prepared as humidity sensors by nanosphere lithography with the magnetron sputtering technique. The X-ray diffraction patterns of SnO(2) nanostructures show that all intense diffraction peaks correspond to the crystallographic planes of SnO(2). The Atomic Force Mic...

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Detalles Bibliográficos
Autores principales: Li, Wei, Liu, Juyan, Ding, Chao, Bai, Gang, Xu, Jie, Ren, Qingying, Li, Jinze
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5677237/
https://www.ncbi.nlm.nih.gov/pubmed/29053624
http://dx.doi.org/10.3390/s17102392
Descripción
Sumario:Ordered SnO(2) nanostructures were prepared as humidity sensors by nanosphere lithography with the magnetron sputtering technique. The X-ray diffraction patterns of SnO(2) nanostructures show that all intense diffraction peaks correspond to the crystallographic planes of SnO(2). The Atomic Force Microscope (AFM) mage shows that these SnO(2) nanostructures exhibited a classic honeycomb structure. The resistance of this sensor was measured to show that the resistance of the sensor decreases with an increase from lower relative humidity (RH) to higher RH. Additionally, the longest response/recovery time was 32 s/42 s for 11–96% RH. The hysteresis for the SnO(2) nanostructure sensor was <5%.