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Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes

This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the fo...

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Autores principales: Ding, Xukai, Jia, Jia, Gao, Yang, Li, Hongsheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5677439/
https://www.ncbi.nlm.nih.gov/pubmed/29019955
http://dx.doi.org/10.3390/s17102306
_version_ 1783277245800906752
author Ding, Xukai
Jia, Jia
Gao, Yang
Li, Hongsheng
author_facet Ding, Xukai
Jia, Jia
Gao, Yang
Li, Hongsheng
author_sort Ding, Xukai
collection PubMed
description This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the force-rebalance operations are derived by using an averaged PSD model and an equivalent transfer function. The obtained expressions are verified through numerical simulations, demonstrating close agreements between the analytic and the numerical models. Based on the derived expressions for the PSD of the NER, the impacts of the modal frequency split, quality factor, and the gain of the feedback forcer, as well as the gain of the signal conditioning circuit, on the gyroscope noise characteristics are theoretically analyzed. In addition, the angle random walk (ARW) and the standard deviation of the NER are also discussed through the PSD models. Finally, the effects of the loop closing, the mode matching, and the gain of the feedback forcer on the PSD of the NER were verified via a MEMS vibratory gyroscope with a tunable modal frequency split.
format Online
Article
Text
id pubmed-5677439
institution National Center for Biotechnology Information
language English
publishDate 2017
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-56774392017-11-17 Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes Ding, Xukai Jia, Jia Gao, Yang Li, Hongsheng Sensors (Basel) Article This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the force-rebalance operations are derived by using an averaged PSD model and an equivalent transfer function. The obtained expressions are verified through numerical simulations, demonstrating close agreements between the analytic and the numerical models. Based on the derived expressions for the PSD of the NER, the impacts of the modal frequency split, quality factor, and the gain of the feedback forcer, as well as the gain of the signal conditioning circuit, on the gyroscope noise characteristics are theoretically analyzed. In addition, the angle random walk (ARW) and the standard deviation of the NER are also discussed through the PSD models. Finally, the effects of the loop closing, the mode matching, and the gain of the feedback forcer on the PSD of the NER were verified via a MEMS vibratory gyroscope with a tunable modal frequency split. MDPI 2017-10-11 /pmc/articles/PMC5677439/ /pubmed/29019955 http://dx.doi.org/10.3390/s17102306 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Ding, Xukai
Jia, Jia
Gao, Yang
Li, Hongsheng
Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes
title Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes
title_full Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes
title_fullStr Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes
title_full_unstemmed Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes
title_short Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes
title_sort mechanical and electrical noise in sense channel of mems vibratory gyroscopes
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5677439/
https://www.ncbi.nlm.nih.gov/pubmed/29019955
http://dx.doi.org/10.3390/s17102306
work_keys_str_mv AT dingxukai mechanicalandelectricalnoiseinsensechannelofmemsvibratorygyroscopes
AT jiajia mechanicalandelectricalnoiseinsensechannelofmemsvibratorygyroscopes
AT gaoyang mechanicalandelectricalnoiseinsensechannelofmemsvibratorygyroscopes
AT lihongsheng mechanicalandelectricalnoiseinsensechannelofmemsvibratorygyroscopes