Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

Detalles Bibliográficos
Autores principales: Tsai, Yi-Pei, Hsieh, Ting-Huan, Lin, Chrong Jung, King, Ya-Chin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2017
Materias:
Correction
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5678889/
https://www.ncbi.nlm.nih.gov/pubmed/29119340
http://dx.doi.org/10.1186/s11671-017-2336-x
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author Tsai, Yi-Pei
Hsieh, Ting-Huan
Lin, Chrong Jung
King, Ya-Chin
author_facet Tsai, Yi-Pei
Hsieh, Ting-Huan
Lin, Chrong Jung
King, Ya-Chin
author_sort Tsai, Yi-Pei
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spelling pubmed-56788892017-11-22 Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes Tsai, Yi-Pei Hsieh, Ting-Huan Lin, Chrong Jung King, Ya-Chin Nanoscale Res Lett Correction Springer US 2017-11-08 /pmc/articles/PMC5678889/ /pubmed/29119340 http://dx.doi.org/10.1186/s11671-017-2336-x Text en © The Author(s). 2017 Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
spellingShingle Correction
Tsai, Yi-Pei
Hsieh, Ting-Huan
Lin, Chrong Jung
King, Ya-Chin
Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
title Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
title_full Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
title_fullStr Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
title_full_unstemmed Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
title_short Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
title_sort correction to: charge splitting in situ recorder (csir) for real-time examination of plasma charging effect in finfet beol processes
topic Correction
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5678889/
https://www.ncbi.nlm.nih.gov/pubmed/29119340
http://dx.doi.org/10.1186/s11671-017-2336-x
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