Simultaneous fabrication of line and dot dual nanopatterns using miktoarm block copolymer with photocleavable linker

Block copolymers with various nanodomains, such as spheres, cylinders, and lamellae, have received attention for their applicability to nanolithography. However, those microdomains are determined by the volume fraction of one block. Meanwhile, nanopatterns with multiple shapes are required for the n...

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Detalles Bibliográficos
Autores principales: Choi, Chungryong, Park, Jichoel, Vincent Joseph, Kanniyambatti L., Lee, Jaeyong, Ahn, Seonghyeon, Kwak, Jongheon, Lee, Kyu Seong, Kim, Jin Kon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5701260/
https://www.ncbi.nlm.nih.gov/pubmed/29176706
http://dx.doi.org/10.1038/s41467-017-02019-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5701260/
https://www.ncbi.nlm.nih.gov/pubmed/29176706
http://dx.doi.org/10.1038/s41467-017-02019-9

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