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Simultaneous fabrication of line and dot dual nanopatterns using miktoarm block copolymer with photocleavable linker
Block copolymers with various nanodomains, such as spheres, cylinders, and lamellae, have received attention for their applicability to nanolithography. However, those microdomains are determined by the volume fraction of one block. Meanwhile, nanopatterns with multiple shapes are required for the n...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5701260/ https://www.ncbi.nlm.nih.gov/pubmed/29176706 http://dx.doi.org/10.1038/s41467-017-02019-9 |