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Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring

The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were te...

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Autores principales: Hsu, Hsiang-Chang, Hsieh, Tso-Sheng, Chen, Yi-Chian, Chen, Hung-En, Tsai, Liren, Chiang, Chia-Chin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5706244/
https://www.ncbi.nlm.nih.gov/pubmed/29137131
http://dx.doi.org/10.3390/ma10111297
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author Hsu, Hsiang-Chang
Hsieh, Tso-Sheng
Chen, Yi-Chian
Chen, Hung-En
Tsai, Liren
Chiang, Chia-Chin
author_facet Hsu, Hsiang-Chang
Hsieh, Tso-Sheng
Chen, Yi-Chian
Chen, Hung-En
Tsai, Liren
Chiang, Chia-Chin
author_sort Hsu, Hsiang-Chang
collection PubMed
description The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were tested using R-soft optical software to simulate the refractive index sensitivity. In these experiments, the temperature sensitivity of the TiN FBG was measured at temperatures ranging from 100 to 500 °C using an optical spectrum analyzer (OSA). The results showed that the temperature sensitivity of the proposed TiN FBG sensor reached 12.8 pm/°C for the temperature range of 100 to 300 °C and 20.8 pm/°C for the temperature range of 300 to 500 °C. Additionally, we found that the produced oxidation at temperatures of 400–500 °C caused a crack, with the crack becoming more and more obvious at higher and higher temperatures.
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spelling pubmed-57062442017-12-04 Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring Hsu, Hsiang-Chang Hsieh, Tso-Sheng Chen, Yi-Chian Chen, Hung-En Tsai, Liren Chiang, Chia-Chin Materials (Basel) Article The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were tested using R-soft optical software to simulate the refractive index sensitivity. In these experiments, the temperature sensitivity of the TiN FBG was measured at temperatures ranging from 100 to 500 °C using an optical spectrum analyzer (OSA). The results showed that the temperature sensitivity of the proposed TiN FBG sensor reached 12.8 pm/°C for the temperature range of 100 to 300 °C and 20.8 pm/°C for the temperature range of 300 to 500 °C. Additionally, we found that the produced oxidation at temperatures of 400–500 °C caused a crack, with the crack becoming more and more obvious at higher and higher temperatures. MDPI 2017-11-11 /pmc/articles/PMC5706244/ /pubmed/29137131 http://dx.doi.org/10.3390/ma10111297 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Hsu, Hsiang-Chang
Hsieh, Tso-Sheng
Chen, Yi-Chian
Chen, Hung-En
Tsai, Liren
Chiang, Chia-Chin
Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
title Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
title_full Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
title_fullStr Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
title_full_unstemmed Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
title_short Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
title_sort fiber-optic thermal sensor for tin film crack monitoring
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5706244/
https://www.ncbi.nlm.nih.gov/pubmed/29137131
http://dx.doi.org/10.3390/ma10111297
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