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Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were te...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5706244/ https://www.ncbi.nlm.nih.gov/pubmed/29137131 http://dx.doi.org/10.3390/ma10111297 |
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author | Hsu, Hsiang-Chang Hsieh, Tso-Sheng Chen, Yi-Chian Chen, Hung-En Tsai, Liren Chiang, Chia-Chin |
author_facet | Hsu, Hsiang-Chang Hsieh, Tso-Sheng Chen, Yi-Chian Chen, Hung-En Tsai, Liren Chiang, Chia-Chin |
author_sort | Hsu, Hsiang-Chang |
collection | PubMed |
description | The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were tested using R-soft optical software to simulate the refractive index sensitivity. In these experiments, the temperature sensitivity of the TiN FBG was measured at temperatures ranging from 100 to 500 °C using an optical spectrum analyzer (OSA). The results showed that the temperature sensitivity of the proposed TiN FBG sensor reached 12.8 pm/°C for the temperature range of 100 to 300 °C and 20.8 pm/°C for the temperature range of 300 to 500 °C. Additionally, we found that the produced oxidation at temperatures of 400–500 °C caused a crack, with the crack becoming more and more obvious at higher and higher temperatures. |
format | Online Article Text |
id | pubmed-5706244 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-57062442017-12-04 Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring Hsu, Hsiang-Chang Hsieh, Tso-Sheng Chen, Yi-Chian Chen, Hung-En Tsai, Liren Chiang, Chia-Chin Materials (Basel) Article The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were tested using R-soft optical software to simulate the refractive index sensitivity. In these experiments, the temperature sensitivity of the TiN FBG was measured at temperatures ranging from 100 to 500 °C using an optical spectrum analyzer (OSA). The results showed that the temperature sensitivity of the proposed TiN FBG sensor reached 12.8 pm/°C for the temperature range of 100 to 300 °C and 20.8 pm/°C for the temperature range of 300 to 500 °C. Additionally, we found that the produced oxidation at temperatures of 400–500 °C caused a crack, with the crack becoming more and more obvious at higher and higher temperatures. MDPI 2017-11-11 /pmc/articles/PMC5706244/ /pubmed/29137131 http://dx.doi.org/10.3390/ma10111297 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Hsu, Hsiang-Chang Hsieh, Tso-Sheng Chen, Yi-Chian Chen, Hung-En Tsai, Liren Chiang, Chia-Chin Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring |
title | Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring |
title_full | Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring |
title_fullStr | Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring |
title_full_unstemmed | Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring |
title_short | Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring |
title_sort | fiber-optic thermal sensor for tin film crack monitoring |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5706244/ https://www.ncbi.nlm.nih.gov/pubmed/29137131 http://dx.doi.org/10.3390/ma10111297 |
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