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Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were te...
Autores principales: | Hsu, Hsiang-Chang, Hsieh, Tso-Sheng, Chen, Yi-Chian, Chen, Hung-En, Tsai, Liren, Chiang, Chia-Chin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5706244/ https://www.ncbi.nlm.nih.gov/pubmed/29137131 http://dx.doi.org/10.3390/ma10111297 |
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