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An Investigation of Polyoxometalate Hybrid Materials as Patternable Dielectrics and Lithographic Resists
Polyoxometalate (POM) hybrid materials have shown potential as spin-coatable, patternable dielectric thin-films and components for lithographic resists. In particular, the octamolybdate cluster has been shown to possess good spin-coating properties and the patterning capabilities of hybrid octamolyb...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5706256/ https://www.ncbi.nlm.nih.gov/pubmed/29140272 http://dx.doi.org/10.3390/ma10111309 |