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Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
Spectrometry is widely used for the characterization of materials, tissues, and gases, and the need for size and cost scaling is driving the development of mini and microspectrometers. While nanophotonic devices provide narrowband filtering that can be used for spectrometry, their practical applicat...
| Autores principales: | , , , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5738394/ https://www.ncbi.nlm.nih.gov/pubmed/29263425 http://dx.doi.org/10.1038/s41467-017-02392-5 |