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Improvement of High-Temperature Stability of Al(2)O(3)/Pt/ZnO/Al(2)O(3) Film Electrode for SAW Devices by Using Al(2)O(3) Barrier Layer

In order to develop film electrodes for the surface acoustic wave (SAW) devices operating in harsh high-temperature environments, novel Al(2)O(3)/Pt/ZnO/Al(2)O(3) multilayered film electrodes were prepared by laser molecular beam epitaxy (LMBE) at 150 °C. The first Al(2)O(3) layer was used as a barr...

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Detalles Bibliográficos
Autores principales:	Liu, Xingpeng, Peng, Bin, Zhang, Wanli, Zhu, Jun, Liu, Xingzhao, Wei, Meng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5744312/ https://www.ncbi.nlm.nih.gov/pubmed/29194385 http://dx.doi.org/10.3390/ma10121377

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