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The Microstructure of Nanocrystalline TiB(2) Films Prepared by Chemical Vapor Deposition
Nanocrystalline titanium diboride (TiB(2)) ceramics films were prepared on a high purity graphite substrate via chemical vapor deposition (CVD). The substrate was synthesized by a gas mixture of TiCl(4), BCl(3), and H(2) under 1000 °C and 10 Pa. Properties and microstructures of TiB(2) films were al...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5744360/ https://www.ncbi.nlm.nih.gov/pubmed/29236061 http://dx.doi.org/10.3390/ma10121425 |