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The Microstructure of Nanocrystalline TiB(2) Films Prepared by Chemical Vapor Deposition

Nanocrystalline titanium diboride (TiB(2)) ceramics films were prepared on a high purity graphite substrate via chemical vapor deposition (CVD). The substrate was synthesized by a gas mixture of TiCl(4), BCl(3), and H(2) under 1000 °C and 10 Pa. Properties and microstructures of TiB(2) films were al...

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Detalles Bibliográficos
Autores principales: Huang, Xiaoxiao, Sun, Shuchen, Tu, Ganfeng, Lu, Shuaidan, Li, Kuanhe, Zhu, Xiaoping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5744360/
https://www.ncbi.nlm.nih.gov/pubmed/29236061
http://dx.doi.org/10.3390/ma10121425

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